Optical wavelength device

ABSTRACT

An optical wavelength dispersion device is disclosed, which includes a waveguide unit and an adjustable reflecting unit, wherein the waveguide unit has a first substrate, an input unit, a grating, a reflector and a second substrate. The input unit is formed on the first substrate and having a slit for receiving an optical signal, a grating is formed on the first substrate for producing an output beam once the optical signal is dispersed, the reflector is formed on the first substrate for reflecting the output beam, the second substrate is located on the input unit, the grating and the reflector, and forms a waveguide space with the first substrate; the adjustable reflecting unit is located outside of the waveguide unit, and is used for changing emitting angle and adjusting focus of the output beam.

CROSS REFERENCE OF RELATED APPLICATION

This is divisional application that claims the benefit of priority under35U.S.C.§ 120 to a non-provisional application, application number15/885,771, filed Jan. 31, 2018, which is incorporated herewith byreference in its entity.

NOTICE OF COPYRIGHT

A portion of the disclosure of this patent document contains materialwhich is subject to copyright protection. The copyright owner has noobjection to any reproduction by anyone of the patent disclosure, as itappears in the United States Patent and Trademark Office patent files orrecords, but otherwise reserves all copyright rights whatsoever.

BACKGROUND OF THE PRESENT INVENTION Field of Invention

The present invention generally relates to a wavelength dispersiondevice, more particularly to an optical wavelength dispersion devicecapable of reducing the size and improving the degree of precise of theoptical wavelength dispersion device.

Description of Related Arts

Conventional spectrometers generally use prism, grating or interferenceto realize dispersion effect, however, the overall size and theresolution ability of a spectrometer needs to be compromised with eachother. Therefore, a conventional high resolution spectrometer is moreexpensive due to the sizable and complicated optical system.

In order to reduce the size of a spectrometer, LIGA (stands forLithography, Electroplating, and Molding) is applied, which is amicro-manufacturing program combining lithography, electroplating, andmolding, so as to enable a micro-structure to have higher degree ofprecision during manufacturing, moreover, to produce a micro-structurehaving a height between hundreds and thousands of micrometer. Due to thestructure of grating which needs to have small spacing, the yield ofLIGA during the molding process and the degree of precision areinsufficient for manufacturing vertical grating.

Furthermore, a light focus shift of the wavelength dispersion device dueto parameter setup during the process of manufacture will decrease thedegree of precision of the wavelength dispersion device. Hence, how torealize an optical wavelength dispersion device that is capable ofreducing the size and improving the degree of precise is certainly ameaningful issue to resolve.

SUMMARY OF THE PRESENT INVENTION

An object of the present invention is to disclose a wavelengthdispersion device, which aim to serve a purpose of reducing the size andimproving the degree of precise of the optical wavelength dispersiondevice.

In order to achieve the objective of the present invention, an opticalwavelength dispersion device is provided, which comprises:

a waveguide unit, which has a first substrate, an input unit, a grating,a reflector and a second substrate. The input unit is formed on thefirst substrate and having a slit for receiving an optical signal, thegrating is formed on the first substrate for producing an output beamonce the optical signal is dispersed, the reflector is located on thefirst substrate and is used for reflecting the output beam, and thesecond substrate, which is located on the input unit, the grating andthe reflector, and forms a waveguide space with the first substrate; andan adjustable reflecting unit, which is located outside of thewavelength unit, being used for changing emitting angle and adjustingfocus of the output beam.

According to one embodiment of the present invention, the input unit,the grating and the reflector are formed by exposing a photoresist layerthrough a high energy light source, and the high energy light source hasits wavelength ranging from 0.01 nm to 100 nm.

According to one embodiment of the present invention, the grating has aconcave, convex or planar profile, and with a surface appearing in acontinuous laminar type, a saw-tooth type, a blaze type, a sinusoidaltype, or a combination of the above.

According to one embodiment of the present invention, the waveguide unitand the adjustable reflecting unit are wrapped by an outer casing.

According to one embodiment of the present invention, the bottom of theouter casing is arranged with a sliding groove, which a sliding memberis located and capable of sliding therein, and the adjustable reflectingunit is connected with the sliding member for adjusting focus of theoutput beam.

In order to achieve the objective of the present invention, an opticalwavelength dispersion device is also provided, which comprises:

a waveguide unit, which has a first substrate, an input unit, a grating,a second substrate and a reflector. The input unit is formed on thefirst substrate and having a slit for receiving an optical signal, thegrating is formed on the first substrate for producing an output beamonce the optical signal is dispersed, the second substrate, which islocated on the input unit, the grating and the reflector, and forms awaveguide space with the first substrate, and the reflector is locatedoutside of the waveguide unit for reflecting the output beam; and anadjustable reflecting unit, which is located outside of the waveguideunit, being used for changing emitting angle and adjusting focus of theoutput beam.

According to one embodiment of the present invention, the input unit andthe grating are formed by exposing a photoresist layer through a highenergy light source, and the high energy light source has its wavelengthranging from 0.01 nm to 100 nm.

According to one embodiment of the present invention, the grating has aconcave, convex or planar profile, and with a surface appearing in acontinuous laminar type, a saw-tooth type, a blaze type, a sinusoidaltype, or a combination of the above.

According to one embodiment of the present invention, the waveguide unitand the adjustable reflecting unit are wrapped by an outer casing.

According to one embodiment of the present invention, the bottom of theouter casing is arranged with a sliding groove, which a sliding memberis located and capable of sliding therein, and the adjustable reflectingunit is connected with the sliding member for adjusting focus of theoutput beam.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects and advantages of the present invention willbecome apparent from the following description of the accompanyingdrawings, which disclose several embodiments of the present invention.It is to be understood that the drawings are to be used for purposes ofillustration only, and not as a definition of the invention.

FIG. 1 illustrates a preferred embodiment of the disclosed opticalwavelength dispersion device.

FIG. 2 illustrates an explosion drawing of another preferred embodimentof the disclosed optical wavelength dispersion device.

FIG. 3 illustrates an integrated drawing of the preferred embodimentabove of the disclosed optical wavelength dispersion device.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The following description is disclosed to enable any person skilled inthe art to make and use the present invention. Preferred embodiments areprovided in the following description only as examples and modificationswill be apparent to those skilled in the art. The general principlesdefined in the following description would be applied to otherembodiments, alternatives, modifications, equivalents, and applicationswithout departing from the spirit and scope of the present invention.

For those skilled in the art, it is understood that terms disclosed inthe present invention, such as “horizontal”, “vertical”, “up”, “down”,“front”, “rear”, “left”, “right”, “upright”, “level”, “top”, “bottom”,“inside”, “outside”, and etc., are to indicate the directional positionor location based on the disclosed figures, which are merely used todescribe the present invention and simplify the description withoutindicating or implying a specific position or location of an apparatusor component, or a specific positional structure or operation.Therefore, the terms are not to be understood as limitations to thepresent invention.

It is understandable that, “one” is interpreted as “at least one” or“one or more than one”, even though one embodiment disclosed in thepresent invention uses “one” indicating the number of a component isone, it is possible for another embodiment to have “at least one” or“one or more than one” for the number of a component. Therefore, “one”is not to be interpreted as a limitation for number.

Although some words has been used in the specification and subsequentclaims to refer to particular components, person having ordinary skillin the art will appreciates that manufacturers may use different termsto refer to a component. The specification and claims are not to bedifferences in the names as a way to distinguish between the components,but with differences in the function of the component as a criterion todistinguish. As mentioned throughout the specification and claims, inwhich the “include, has, comprise, and with” are an open-ended term,they should be interpreted as “including but not limited to”.

FIG. 1 illustrates one preferred embodiment for the optical wavelengthdispersion device disclosed in the present invention, which shows: anoptical wavelength dispersion device 10 is made of a waveguide unit 11and an adjustable reflecting unit 12. The waveguide unit 11 and theadjustable reflecting unit 12 are wrapped by an outer casing 13 and acovering plate 14. The waveguide unit 11 includes a first substrate 111,an input unit 112, a grating 113, a reflector 114 and a second substrate116; the input unit 112 is formed on the first substrate 111 and havinga slit 115 for receiving an optical signal, wherein the slit 115 has awidth ranged between 5 μm and 500 μm; the grating 113 is formed on thefirst substrate 111, which generates and outputs a first beam (defocusedand focused beam) based on the optical signal, thereby conductingdispersion, and having the incident arranged at the reflector 114 on thefirst substrate. In addition, the input unit 112, the grating 113 andthe reflector 114 are formed by exposing a photoresist layer under ahigh energy light source on the first substrate. The high energy lightsource may be selected from any of X-ray, soft X-ray or extremeultraviolet (EUV), wherein the X-ray has its wavelength ranging from0.01 nm to 1 nm; the soft X-ray has its wavelength ranging from 0.1 nmto 10 nm; and the EUV has its wavelength ranging from 10 nm to 120 nm.The first substrate 111 and the second substrate 116 may be selectedfrom any of semiconductor substrates, glass substrates, metal substratesor plastic substrates. Notably, due to the surface roughness limitationin optical telecommunications and local optical communications, thewavelength with 0.1 nm to 1 nm of the high energy light source is betterthan that with 1 nm to 100 nm, and the photoresist layer is made of SU-8or PMMA.

As disclosed above, the grating 113 has a concave, convex or planarprofile, and with a surface appearing in a continuous laminar type, asaw-tooth type, a blaze type, a sinusoidal type, or a combination of theabove. Generally speaking, the grating 113 is used for increasing thediffraction efficiency of specified diffraction hierarchy, and anappropriate wavelength of the optical signal is from 200 nm to 2000 nm.

Owing to a fact that the total route for the optical signal to enterinto the waveguide unit 11 from the slit 115 and finally to be outputtedis fixed after a carefully calculation, an excessive or insufficientroute will make impact on optical aberration, therefore, the design ofthe reflector 114 in the aforementioned embodiment is able to enable thefirst beam to conduct a second reflection on the waveguide unit 11,thereby reducing the size of the wavelength dispersion device under thepremise that the waveguide unit 11 has the same optical path route.

FIG. 2 and FIG. 3 illustrate another embodiment wavelength dispersiondevice disclosed in the present invention, which show: the reflector 114of the wavelength dispersion device, wherein the reflector 114 islocated outside of the waveguide unit 11 for reflection the output beam;and another adjustable reflecting unit 12 being used for outputting thefirst beam (defocused and focused beam) from the reflector 114, andchanging emitting angle of the first beam. Additionally, an image sensor151 is able to receive the first beam from the adjustable reflectingunit 12 for subsequent processes.

Following the aforementioned as shown in FIG. 2, the second substrate116 covers the input unit 112, the grating 113 and the reflector 114,therefore, the first substrate 111 and the second substrate 116 form aspace which can be viewed as a waveguide unit 11 and is used forreceiving and transmitting optical signals.

Furthermore, based on the aforementioned embodiment, the input unit 112and the grating 113 are formed by exposing a photoresist layer under ahigh energy light source on the first substrate 111. The high energylight source may be selected from any of X-ray, soft X-ray or extremeultraviolet (EUV), wherein the X-ray has its wavelength ranging from0.01 nm to 1 nm; the soft X-ray has its wavelength ranging from 0.1 nmto 10 nm; the EUV has its wavelength ranging from 10 nm to 120 nm.

The first substrate 111 and the second substrate 116 may be selectedfrom any of semiconductor substrates, glass substrates, metal substratesor plastic substrates. Notably, due to the surface roughness limitationin optical telecommunications and local optical communications, thewavelength with 0.1 nm to 1 nm of the high energy light source is betterthan that with 1 nm to 100 nm, and the photoresist layer is made of SU-8or PMMA.

Due to the adjustable reflecting unit 12 is used for outputting thefirst beam from the reflector 114 as disclosed in the aforementionedembodiment, hence, the image sensor 151 can be placed in any directionand location (particularly above or below) of the optical wavelengthdispersion device 10 based on user's requirements, thereby reducing theoverall size.

Additionally, as shown in FIGS. 2 and 3, since the adjustable reflector12 changes emitting angle of the first beam, the covering plate 14 isarranged with an opening 141 with respect to the reflector 12, therebyenabling the first beam to output. In the preferred embodiment of thepresent invention, the covering plate 14 is allocated with an IC carrier15, and the image sensor 151 is arranged on the IC carrier 15 incorresponding to the position of the opening 141, so as to receive thefirst beam for subsequent analyses. Consequently, a combination of theimage sensor 151 and the disclosed optical wavelength dispersion devicereduces further the size of overall system.

Furthermore, as shown in FIG. 2, the outer casing 13 is arranged with asliding groove 131 at the bottom, wherein a sliding member 132 islocated so as to slide inside the sliding groove 131 as needed. Theadjustable reflecting unit 12 is connected with the sliding member 132for adjusting focus of the output beam. That is, when the first beam isout-of-focus outputted, the user is able to adjust the position of theadjustable reflecting unit 12 through the sliding member 132, therebychanging the distance of an overall optical route in order to adjust thefocus of the output beam.

Finally, as shown in FIG. 3, the optical wavelength dispersion device 10further includes a configuration that wraps up the waveguide unit 11 andthe reflector 12 by using an outer casing 13 and a covering plate 14.Having protected by the outer casing 13 and the covering plate 14, thewaveguide unit 11 and the reflector 12 avoid direct contact withexternal force, thereby maintaining stability of the overall structure.When optical signal enters into the waveguide unit 11 through the slit115 of the input unit 16 (usually an optical fiber cable), the processof dispersion begins.

There have thus been shown and described an optical wavelengthdispersion device. Many changes, modifications, variations and otheruses and applications of the subject invention will, however, becomeapparent to those skilled in the art after considering thisspecification and the accompanying drawings which disclose the preferredembodiments thereof. All such changes, modifications, variations andother uses and applications which do not depart from the spirit andscope of the invention are deemed to be covered by the invention.

Although some words has been used in the specification and subsequentclaims to refer to particular components, person having ordinary skillin the art will appreciates that manufacturers may use different termsto refer to a component. The specification and claims are not to bedifferences in the names as a way to distinguish between the components,but with differences in the function of the component as a criterion todistinguish.

Preferred embodiments are provided only as examples without limiting thescope of the present invention, and modifications will be apparent tothose skilled in the art. The purpose of the present invention has beencompleted and served effectively. The functions and general principlesdefined in the present invention would be applied to other embodiments,alternatives, modifications, equivalents, and applications withoutdeparting from the spirit and scope of the present invention.

What is claimed is:
 1. An optical wavelength dispersion device,comprising: a waveguide unit, which includes: a first substrate; aninput unit, which is formed on the first substrate and has a slit forreceiving an optical signal; a grating, which is formed on the firstsubstrate and capable of producing an output beam once the opticalsignal has been dispersed; a reflector, which is located outside of thewaveguide unit, being used for reflecting the output beam; a secondsubstrate, which is located on the input unit, the grating and thereflector, forming a waveguide space with the first substrate; and anadjustable reflecting unit, which is located outside of the waveguideunit, being used for changing emitting angle and adjusting focus of theoutput beam.
 2. The optical wavelength dispersion device of claim 1,wherein the input unit and the grating are formed by exposing aphotoresist layer under a high energy light source, which the highenergy light source has a wavelength thereof ranging from 0.01 nm to 100nm.
 3. The optical wavelength dispersion device of claim 1, wherein thegrating has a concave, convex or planar profile, and a surface appearingin a continuous laminar type, a saw-tooth type, a blaze type, asinusoidal type, or a combination of the above.
 4. The opticalwavelength dispersion device of claim 1, wherein the waveguide unit andthe adjustable reflecting unit are wrapped by an outer casing.
 5. Theoptical wavelength dispersion device of claim 4, wherein a bottom of theouter casing is provided with a sliding groove, wherein a sliding memberis located and capable of sliding therein, and the adjustable reflectingunit is connected with the sliding member for adjusting focus of theoutput beam.